May 20, 2024  
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2021-2022 Graduate Catalog [ARCHIVED BULLETIN]

ME 517 - Optical Metrology


3 credit(s)
Fundamentals of lenses and lens systems - Telescopes, microscopes, optical properties of surfaces and films, diffraction and interference, 3D scanning and large scale metrology using triangulation, light scattering methods, interferometers, stage metrology and interference microscopy, digital holography, confocal, focus sensing, Moiré and structured light microscopy, single-point sensors and non-contact CMM.
Prerequisite(s): Graduate standing or permission of instructor.
Laboratory fee.


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